1/16/2011	11:55:29 AM	Helium MFC set to  40.000000
1/16/2011	11:55:30 AM	Helium valve opened
1/16/2011	11:58:36 AM	Helium valve closed
1/16/2011	12:00:05 PM	Recipe started at 12:00 PM
1/16/2011	12:00:05 PM	Helium valve closed
1/16/2011	12:00:05 PM	BCl3 valve closed
1/16/2011	12:00:05 PM	PH3 valve closed
1/16/2011	12:00:05 PM	SiCl4 pre valve closed
1/16/2011	12:00:05 PM	SiCl4 post valve closed
1/16/2011	12:00:05 PM	Main Vac valve closed
1/16/2011	12:00:05 PM	Bypass valve closed
1/16/2011	12:00:05 PM	Bubbler valve closed
1/16/2011	12:00:05 PM	H2 valve opened
1/16/2011	12:00:05 PM	Helium MFC set to  0.000000
1/16/2011	12:00:05 PM	H2 MFC set to  500.000000
1/16/2011	12:00:05 PM	BCl3 MFC set to  0.000000
1/16/2011	12:00:05 PM	PHl3 MFC set to  0.000000
1/16/2011	12:00:05 PM	SiCl4 MFC set to  0.000000
1/16/2011	12:00:05 PM	Bypass solenoid MFC set to  0.000000
1/16/2011	12:00:05 PM	Tube furnace set to 0
1/16/2011	12:01:29 PM	Helium valve closed
1/16/2011	12:01:29 PM	BCl3 valve closed
1/16/2011	12:01:29 PM	PH3 valve closed
1/16/2011	12:01:29 PM	SiCl4 pre valve closed
1/16/2011	12:01:29 PM	SiCl4 post valve closed
1/16/2011	12:01:29 PM	Main Vac valve closed
1/16/2011	12:01:29 PM	Bypass valve closed
1/16/2011	12:01:29 PM	H2 valve opened
1/16/2011	12:01:29 PM	Bubbler valve opened
1/16/2011	12:01:29 PM	Helium MFC set to  0.000000
1/16/2011	12:01:29 PM	H2 MFC set to  500.000000
1/16/2011	12:01:29 PM	BCl3 MFC set to  0.000000
1/16/2011	12:01:29 PM	PHl3 MFC set to  0.000000
1/16/2011	12:01:29 PM	SiCl4 MFC set to  0.000000
1/16/2011	12:01:29 PM	Bypass solenoid MFC set to  0.000000
1/16/2011	12:01:29 PM	Tube furnace set to 1000
1/16/2011	12:21:29 PM	Helium valve closed
1/16/2011	12:21:29 PM	BCl3 valve closed
1/16/2011	12:21:29 PM	Main Vac valve closed
1/16/2011	12:21:29 PM	Bypass valve closed
1/16/2011	12:21:29 PM	H2 valve opened
1/16/2011	12:21:29 PM	PH3 valve opened
1/16/2011	12:21:29 PM	SiCl4 pre valve opened
1/16/2011	12:21:29 PM	SiCl4 post valve opened
1/16/2011	12:21:29 PM	Bubbler valve opened
1/16/2011	12:21:29 PM	Helium MFC set to  0.000000
1/16/2011	12:21:29 PM	H2 MFC set to  500.000000
1/16/2011	12:21:29 PM	BCl3 MFC set to  0.000000
1/16/2011	12:21:29 PM	PHl3 MFC set to  0.400000
1/16/2011	12:21:29 PM	SiCl4 MFC set to  50.000000
1/16/2011	12:21:29 PM	Bypass solenoid MFC set to  0.000000
1/16/2011	12:21:29 PM	Tube furnace set to 1000
1/16/2011	12:41:29 PM	H2 valve closed
1/16/2011	12:41:29 PM	BCl3 valve closed
1/16/2011	12:41:29 PM	PH3 valve closed
1/16/2011	12:41:30 PM	SiCl4 pre valve closed
1/16/2011	12:41:30 PM	SiCl4 post valve closed
1/16/2011	12:41:30 PM	Main Vac valve closed
1/16/2011	12:41:30 PM	Bypass valve closed
1/16/2011	12:41:30 PM	Helium valve opened
1/16/2011	12:41:30 PM	Bubbler valve opened
1/16/2011	12:41:30 PM	Helium MFC set to  500.000000
1/16/2011	12:41:30 PM	H2 MFC set to  0.000000
1/16/2011	12:41:30 PM	BCl3 MFC set to  0.000000
1/16/2011	12:41:30 PM	PHl3 MFC set to  0.000000
1/16/2011	12:41:30 PM	SiCl4 MFC set to  0.000000
1/16/2011	12:41:30 PM	Bypass solenoid MFC set to  0.000000
1/16/2011	12:41:30 PM	Tube furnace set to 950
1/16/2011	12:46:30 PM	H2 valve closed
1/16/2011	12:46:30 PM	BCl3 valve closed
1/16/2011	12:46:30 PM	PH3 valve closed
1/16/2011	12:46:30 PM	SiCl4 pre valve closed
1/16/2011	12:46:30 PM	SiCl4 post valve closed
1/16/2011	12:46:30 PM	Main Vac valve closed
1/16/2011	12:46:30 PM	Bypass valve closed
1/16/2011	12:46:30 PM	Helium valve opened
1/16/2011	12:46:30 PM	Bubbler valve opened
1/16/2011	12:46:30 PM	Helium MFC set to  500.000000
1/16/2011	12:46:30 PM	H2 MFC set to  0.000000
1/16/2011	12:46:30 PM	BCl3 MFC set to  0.000000
1/16/2011	12:46:30 PM	PHl3 MFC set to  0.000000
1/16/2011	12:46:30 PM	SiCl4 MFC set to  0.000000
1/16/2011	12:46:30 PM	Bypass solenoid MFC set to  0.000000
1/16/2011	12:46:30 PM	Tube furnace set to 900
1/16/2011	12:51:30 PM	H2 valve closed
1/16/2011	12:51:30 PM	BCl3 valve closed
1/16/2011	12:51:30 PM	PH3 valve closed
1/16/2011	12:51:30 PM	SiCl4 pre valve closed
1/16/2011	12:51:30 PM	SiCl4 post valve closed
1/16/2011	12:51:30 PM	Main Vac valve closed
1/16/2011	12:51:30 PM	Bypass valve closed
1/16/2011	12:51:30 PM	Helium valve opened
1/16/2011	12:51:30 PM	Bubbler valve opened
1/16/2011	12:51:30 PM	Helium MFC set to  500.000000
1/16/2011	12:51:30 PM	H2 MFC set to  0.000000
1/16/2011	12:51:30 PM	BCl3 MFC set to  0.000000
1/16/2011	12:51:30 PM	PHl3 MFC set to  0.000000
1/16/2011	12:51:30 PM	SiCl4 MFC set to  0.000000
1/16/2011	12:51:30 PM	Bypass solenoid MFC set to  0.000000
1/16/2011	12:51:30 PM	Tube furnace set to 850
1/16/2011	12:56:30 PM	H2 valve closed
1/16/2011	12:56:30 PM	BCl3 valve closed
1/16/2011	12:56:30 PM	PH3 valve closed
1/16/2011	12:56:30 PM	SiCl4 pre valve closed
1/16/2011	12:56:30 PM	SiCl4 post valve closed
1/16/2011	12:56:30 PM	Main Vac valve closed
1/16/2011	12:56:30 PM	Bypass valve closed
1/16/2011	12:56:30 PM	Helium valve opened
1/16/2011	12:56:30 PM	Bubbler valve opened
1/16/2011	12:56:30 PM	Helium MFC set to  500.000000
1/16/2011	12:56:30 PM	H2 MFC set to  0.000000
1/16/2011	12:56:30 PM	BCl3 MFC set to  0.000000
1/16/2011	12:56:30 PM	PHl3 MFC set to  0.000000
1/16/2011	12:56:30 PM	SiCl4 MFC set to  0.000000
1/16/2011	12:56:30 PM	Bypass solenoid MFC set to  0.000000
1/16/2011	12:56:30 PM	Tube furnace set to 800
1/16/2011	1:01:30 PM	H2 valve closed
1/16/2011	1:01:30 PM	BCl3 valve closed
1/16/2011	1:01:30 PM	PH3 valve closed
1/16/2011	1:01:30 PM	SiCl4 pre valve closed
1/16/2011	1:01:30 PM	SiCl4 post valve closed
1/16/2011	1:01:30 PM	Main Vac valve closed
1/16/2011	1:01:30 PM	Bypass valve closed
1/16/2011	1:01:30 PM	Helium valve opened
1/16/2011	1:01:30 PM	Bubbler valve opened
1/16/2011	1:01:30 PM	Helium MFC set to  500.000000
1/16/2011	1:01:30 PM	H2 MFC set to  0.000000
1/16/2011	1:01:30 PM	BCl3 MFC set to  0.000000
1/16/2011	1:01:30 PM	PHl3 MFC set to  0.000000
1/16/2011	1:01:30 PM	SiCl4 MFC set to  0.000000
1/16/2011	1:01:30 PM	Bypass solenoid MFC set to  0.000000
1/16/2011	1:01:30 PM	Tube furnace set to 750
1/16/2011	1:06:30 PM	H2 valve closed
1/16/2011	1:06:30 PM	BCl3 valve closed
1/16/2011	1:06:30 PM	PH3 valve closed
1/16/2011	1:06:30 PM	SiCl4 pre valve closed
1/16/2011	1:06:30 PM	SiCl4 post valve closed
1/16/2011	1:06:30 PM	Main Vac valve closed
1/16/2011	1:06:30 PM	Bypass valve closed
1/16/2011	1:06:30 PM	Helium valve opened
1/16/2011	1:06:30 PM	Bubbler valve opened
1/16/2011	1:06:30 PM	Helium MFC set to  500.000000
1/16/2011	1:06:30 PM	H2 MFC set to  0.000000
1/16/2011	1:06:30 PM	BCl3 MFC set to  0.000000
1/16/2011	1:06:30 PM	PHl3 MFC set to  0.000000
1/16/2011	1:06:30 PM	SiCl4 MFC set to  0.000000
1/16/2011	1:06:30 PM	Bypass solenoid MFC set to  0.000000
1/16/2011	1:06:31 PM	Tube furnace set to 700
1/16/2011	1:11:31 PM	H2 valve closed
1/16/2011	1:11:31 PM	BCl3 valve closed
1/16/2011	1:11:31 PM	PH3 valve closed
1/16/2011	1:11:31 PM	SiCl4 pre valve closed
1/16/2011	1:11:31 PM	SiCl4 post valve closed
1/16/2011	1:11:31 PM	Main Vac valve closed
1/16/2011	1:11:31 PM	Bypass valve closed
1/16/2011	1:11:31 PM	Helium valve opened
1/16/2011	1:11:31 PM	Bubbler valve opened
1/16/2011	1:11:31 PM	Helium MFC set to  500.000000
1/16/2011	1:11:31 PM	H2 MFC set to  0.000000
1/16/2011	1:11:31 PM	BCl3 MFC set to  0.000000
1/16/2011	1:11:31 PM	PHl3 MFC set to  0.000000
1/16/2011	1:11:31 PM	SiCl4 MFC set to  0.000000
1/16/2011	1:11:31 PM	Bypass solenoid MFC set to  0.000000
1/16/2011	1:11:31 PM	Tube furnace set to 0
1/16/2011	1:31:31 PM	Helium valve closed
1/16/2011	1:31:31 PM	H2 valve closed
1/16/2011	1:31:31 PM	BCl3 valve closed
1/16/2011	1:31:31 PM	PH3 valve closed
1/16/2011	1:31:31 PM	SiCl4 pre valve closed
1/16/2011	1:31:31 PM	SiCl4 post valve closed
1/16/2011	1:31:31 PM	Main Vac valve closed
1/16/2011	1:31:31 PM	Bypass valve closed
1/16/2011	1:31:31 PM	Bubbler valve closed
1/16/2011	1:31:31 PM	Helium MFC set to  0.000000
1/16/2011	1:31:31 PM	H2 MFC set to  0.000000
1/16/2011	1:31:31 PM	BCl3 MFC set to  0.000000
1/16/2011	1:31:31 PM	PHl3 MFC set to  0.000000
1/16/2011	1:31:31 PM	SiCl4 MFC set to  0.000000
1/16/2011	1:31:31 PM	Bypass solenoid MFC set to  0.000000
1/16/2011	1:31:31 PM	Tube furnace set to 0
1/16/2011	1:31:31 PM	Run finished at 1:31 PM
1/16/2011	1:35:51 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/16/2011	1:35:52 PM	Recipe started at 1:35 PM
1/16/2011	1:35:52 PM	Helium valve closed
1/16/2011	1:35:52 PM	H2 valve closed
1/16/2011	1:35:52 PM	BCl3 valve closed
1/16/2011	1:35:52 PM	PH3 valve closed
1/16/2011	1:35:52 PM	SiCl4 pre valve closed
1/16/2011	1:35:52 PM	SiCl4 post valve closed
1/16/2011	1:35:52 PM	Main Vac valve closed
1/16/2011	1:35:52 PM	Bubbler valve closed
1/16/2011	1:35:52 PM	Bypass valve opened
1/16/2011	1:35:52 PM	Helium MFC set to  0.000000
1/16/2011	1:35:52 PM	H2 MFC set to  0.000000
1/16/2011	1:35:52 PM	BCl3 MFC set to  0.000000
1/16/2011	1:35:52 PM	PHl3 MFC set to  0.000000
1/16/2011	1:35:52 PM	SiCl4 MFC set to  0.000000
1/16/2011	1:35:52 PM	Bypass solenoid MFC set to  0.000000
1/16/2011	1:35:52 PM	Tube furnace set to 0
1/16/2011	1:36:24 PM	Helium valve closed
1/16/2011	1:36:24 PM	H2 valve closed
1/16/2011	1:36:24 PM	BCl3 valve closed
1/16/2011	1:36:24 PM	PH3 valve closed
1/16/2011	1:36:24 PM	SiCl4 pre valve closed
1/16/2011	1:36:24 PM	SiCl4 post valve closed
1/16/2011	1:36:24 PM	Bubbler valve closed
1/16/2011	1:36:24 PM	Main Vac valve opened
1/16/2011	1:36:24 PM	Bypass valve opened
1/16/2011	1:36:24 PM	Helium MFC set to  0.000000
1/16/2011	1:36:24 PM	H2 MFC set to  0.000000
1/16/2011	1:36:24 PM	BCl3 MFC set to  0.000000
1/16/2011	1:36:24 PM	PHl3 MFC set to  0.000000
1/16/2011	1:36:24 PM	SiCl4 MFC set to  0.000000
1/16/2011	1:36:24 PM	Bypass solenoid MFC set to  0.000000
1/16/2011	1:36:24 PM	Tube furnace set to 0
1/16/2011	1:36:24 PM	Run finished at 1:36 PM
1/16/2011	1:36:24 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/16/2011	2:11:33 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/16/2011	2:11:33 PM	Recipe started at 2:11 PM
1/16/2011	2:11:33 PM	H2 valve closed
1/16/2011	2:11:33 PM	BCl3 valve closed
1/16/2011	2:11:33 PM	PH3 valve closed
1/16/2011	2:11:33 PM	SiCl4 pre valve closed
1/16/2011	2:11:33 PM	SiCl4 post valve closed
1/16/2011	2:11:33 PM	Main Vac valve closed
1/16/2011	2:11:33 PM	Bypass valve closed
1/16/2011	2:11:33 PM	Bubbler valve closed
1/16/2011	2:11:33 PM	Helium valve opened
1/16/2011	2:11:33 PM	Helium MFC set to  500.000000
1/16/2011	2:11:33 PM	H2 MFC set to  0.000000
1/16/2011	2:11:33 PM	BCl3 MFC set to  0.000000
1/16/2011	2:11:33 PM	PHl3 MFC set to  0.000000
1/16/2011	2:11:33 PM	SiCl4 MFC set to  0.000000
1/16/2011	2:11:33 PM	Bypass solenoid MFC set to  0.000000
1/16/2011	2:11:34 PM	Tube furnace set to 0
1/16/2011	2:12:54 PM	Helium valve closed
1/16/2011	2:12:54 PM	H2 valve closed
1/16/2011	2:12:54 PM	BCl3 valve closed
1/16/2011	2:12:54 PM	PH3 valve closed
1/16/2011	2:12:54 PM	SiCl4 pre valve closed
1/16/2011	2:12:54 PM	SiCl4 post valve closed
1/16/2011	2:12:54 PM	Main Vac valve closed
1/16/2011	2:12:54 PM	Bypass valve closed
1/16/2011	2:12:54 PM	Bubbler valve closed
1/16/2011	2:12:54 PM	Helium MFC set to  0.000000
1/16/2011	2:12:54 PM	H2 MFC set to  0.000000
1/16/2011	2:12:54 PM	BCl3 MFC set to  0.000000
1/16/2011	2:12:54 PM	PHl3 MFC set to  0.000000
1/16/2011	2:12:54 PM	SiCl4 MFC set to  0.000000
1/16/2011	2:12:54 PM	Bypass solenoid MFC set to  0.000000
1/16/2011	2:12:55 PM	Tube furnace set to 0
1/16/2011	2:12:55 PM	Run finished at 2:12 PM
1/16/2011	2:12:55 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/16/2011	2:16:41 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/16/2011	2:16:41 PM	Recipe started at 2:16 PM
1/16/2011	2:16:41 PM	Helium valve closed
1/16/2011	2:16:41 PM	H2 valve closed
1/16/2011	2:16:41 PM	BCl3 valve closed
1/16/2011	2:16:41 PM	PH3 valve closed
1/16/2011	2:16:41 PM	SiCl4 pre valve closed
1/16/2011	2:16:41 PM	SiCl4 post valve closed
1/16/2011	2:16:41 PM	Main Vac valve closed
1/16/2011	2:16:41 PM	Bubbler valve closed
1/16/2011	2:16:41 PM	Bypass valve opened
1/16/2011	2:16:41 PM	Helium MFC set to  0.000000
1/16/2011	2:16:41 PM	H2 MFC set to  0.000000
1/16/2011	2:16:41 PM	BCl3 MFC set to  0.000000
1/16/2011	2:16:41 PM	PHl3 MFC set to  0.000000
1/16/2011	2:16:42 PM	SiCl4 MFC set to  0.000000
1/16/2011	2:16:42 PM	Bypass solenoid MFC set to  0.000000
1/16/2011	2:16:42 PM	Tube furnace set to 0
1/16/2011	2:17:13 PM	Helium valve closed
1/16/2011	2:17:13 PM	H2 valve closed
1/16/2011	2:17:13 PM	BCl3 valve closed
1/16/2011	2:17:13 PM	PH3 valve closed
1/16/2011	2:17:13 PM	SiCl4 pre valve closed
1/16/2011	2:17:13 PM	SiCl4 post valve closed
1/16/2011	2:17:13 PM	Bubbler valve closed
1/16/2011	2:17:13 PM	Main Vac valve opened
1/16/2011	2:17:13 PM	Bypass valve opened
1/16/2011	2:17:13 PM	Helium MFC set to  0.000000
1/16/2011	2:17:13 PM	H2 MFC set to  0.000000
1/16/2011	2:17:13 PM	BCl3 MFC set to  0.000000
1/16/2011	2:17:13 PM	PHl3 MFC set to  0.000000
1/16/2011	2:17:13 PM	SiCl4 MFC set to  0.000000
1/16/2011	2:17:13 PM	Bypass solenoid MFC set to  0.000000
1/16/2011	2:17:13 PM	Tube furnace set to 0
1/16/2011	2:17:13 PM	Run finished at 2:17 PM
1/16/2011	2:17:13 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/16/2011	2:25:07 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/16/2011	2:25:08 PM	Recipe started at 2:25 PM
1/16/2011	2:25:08 PM	H2 valve closed
1/16/2011	2:25:08 PM	BCl3 valve closed
1/16/2011	2:25:08 PM	PH3 valve closed
1/16/2011	2:25:08 PM	SiCl4 pre valve closed
1/16/2011	2:25:08 PM	SiCl4 post valve closed
1/16/2011	2:25:08 PM	Main Vac valve closed
1/16/2011	2:25:08 PM	Bypass valve closed
1/16/2011	2:25:08 PM	Bubbler valve closed
1/16/2011	2:25:08 PM	Helium valve opened
1/16/2011	2:25:08 PM	Helium MFC set to  500.000000
1/16/2011	2:25:08 PM	H2 MFC set to  0.000000
1/16/2011	2:25:08 PM	BCl3 MFC set to  0.000000
1/16/2011	2:25:08 PM	PHl3 MFC set to  0.000000
1/16/2011	2:25:08 PM	SiCl4 MFC set to  0.000000
1/16/2011	2:25:08 PM	Bypass solenoid MFC set to  0.000000
1/16/2011	2:25:08 PM	Tube furnace set to 0
1/16/2011	2:26:29 PM	Helium valve closed
1/16/2011	2:26:29 PM	H2 valve closed
1/16/2011	2:26:29 PM	BCl3 valve closed
1/16/2011	2:26:29 PM	PH3 valve closed
1/16/2011	2:26:29 PM	SiCl4 pre valve closed
1/16/2011	2:26:29 PM	SiCl4 post valve closed
1/16/2011	2:26:29 PM	Main Vac valve closed
1/16/2011	2:26:29 PM	Bypass valve closed
1/16/2011	2:26:29 PM	Bubbler valve closed
1/16/2011	2:26:29 PM	Helium MFC set to  0.000000
1/16/2011	2:26:29 PM	H2 MFC set to  0.000000
1/16/2011	2:26:29 PM	BCl3 MFC set to  0.000000
1/16/2011	2:26:29 PM	PHl3 MFC set to  0.000000
1/16/2011	2:26:29 PM	SiCl4 MFC set to  0.000000
1/16/2011	2:26:29 PM	Bypass solenoid MFC set to  0.000000
1/16/2011	2:26:29 PM	Tube furnace set to 0
1/16/2011	2:26:30 PM	Run finished at 2:26 PM
1/16/2011	2:26:30 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/16/2011	2:28:35 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/16/2011	2:28:36 PM	Recipe started at 2:28 PM
1/16/2011	2:28:36 PM	Helium valve closed
1/16/2011	2:28:36 PM	H2 valve closed
1/16/2011	2:28:36 PM	BCl3 valve closed
1/16/2011	2:28:36 PM	PH3 valve closed
1/16/2011	2:28:36 PM	SiCl4 pre valve closed
1/16/2011	2:28:36 PM	SiCl4 post valve closed
1/16/2011	2:28:36 PM	Main Vac valve closed
1/16/2011	2:28:36 PM	Bubbler valve closed
1/16/2011	2:28:36 PM	Bypass valve opened
1/16/2011	2:28:36 PM	Helium MFC set to  0.000000
1/16/2011	2:28:36 PM	H2 MFC set to  0.000000
1/16/2011	2:28:36 PM	BCl3 MFC set to  0.000000
1/16/2011	2:28:36 PM	PHl3 MFC set to  0.000000
1/16/2011	2:28:36 PM	SiCl4 MFC set to  0.000000
1/16/2011	2:28:36 PM	Bypass solenoid MFC set to  0.000000
1/16/2011	2:28:36 PM	Tube furnace set to 0
1/16/2011	2:29:07 PM	Helium valve closed
1/16/2011	2:29:07 PM	H2 valve closed
1/16/2011	2:29:07 PM	BCl3 valve closed
1/16/2011	2:29:07 PM	PH3 valve closed
1/16/2011	2:29:07 PM	SiCl4 pre valve closed
1/16/2011	2:29:07 PM	SiCl4 post valve closed
1/16/2011	2:29:07 PM	Bubbler valve closed
1/16/2011	2:29:07 PM	Main Vac valve opened
1/16/2011	2:29:07 PM	Bypass valve opened
1/16/2011	2:29:07 PM	Helium MFC set to  0.000000
1/16/2011	2:29:07 PM	H2 MFC set to  0.000000
1/16/2011	2:29:07 PM	BCl3 MFC set to  0.000000
1/16/2011	2:29:07 PM	PHl3 MFC set to  0.000000
1/16/2011	2:29:07 PM	SiCl4 MFC set to  0.000000
1/16/2011	2:29:07 PM	Bypass solenoid MFC set to  0.000000
1/16/2011	2:29:07 PM	Tube furnace set to 0
1/16/2011	2:29:07 PM	Run finished at 2:29 PM
1/16/2011	2:29:07 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/16/2011	2:29:22 PM	Helium MFC set to  20.000000
1/16/2011	2:29:23 PM	Helium valve opened
1/16/2011	2:37:33 PM	Helium valve closed
1/16/2011	2:38:20 PM	Helium valve opened
1/16/2011	3:09:28 PM	Helium valve closed
1/16/2011	3:10:38 PM	Recipe started at 3:10 PM
1/16/2011	3:10:38 PM	Helium valve closed
1/16/2011	3:10:38 PM	BCl3 valve closed
1/16/2011	3:10:38 PM	PH3 valve closed
1/16/2011	3:10:38 PM	SiCl4 pre valve closed
1/16/2011	3:10:38 PM	SiCl4 post valve closed
1/16/2011	3:10:38 PM	Main Vac valve closed
1/16/2011	3:10:38 PM	Bypass valve closed
1/16/2011	3:10:38 PM	Bubbler valve closed
1/16/2011	3:10:38 PM	H2 valve opened
1/16/2011	3:10:38 PM	Helium MFC set to  0.000000
1/16/2011	3:10:38 PM	H2 MFC set to  500.000000
1/16/2011	3:10:38 PM	BCl3 MFC set to  0.000000
1/16/2011	3:10:38 PM	PHl3 MFC set to  0.000000
1/16/2011	3:10:38 PM	SiCl4 MFC set to  0.000000
1/16/2011	3:10:38 PM	Bypass solenoid MFC set to  0.000000
1/16/2011	3:10:38 PM	Tube furnace set to 0
1/16/2011	3:12:02 PM	Helium valve closed
1/16/2011	3:12:02 PM	BCl3 valve closed
1/16/2011	3:12:02 PM	PH3 valve closed
1/16/2011	3:12:02 PM	SiCl4 pre valve closed
1/16/2011	3:12:02 PM	SiCl4 post valve closed
1/16/2011	3:12:02 PM	Main Vac valve closed
1/16/2011	3:12:02 PM	Bypass valve closed
1/16/2011	3:12:02 PM	H2 valve opened
1/16/2011	3:12:02 PM	Bubbler valve opened
1/16/2011	3:12:02 PM	Helium MFC set to  0.000000
1/16/2011	3:12:02 PM	H2 MFC set to  500.000000
1/16/2011	3:12:02 PM	BCl3 MFC set to  0.000000
1/16/2011	3:12:02 PM	PHl3 MFC set to  0.000000
1/16/2011	3:12:02 PM	SiCl4 MFC set to  0.000000
1/16/2011	3:12:02 PM	Bypass solenoid MFC set to  0.000000
1/16/2011	3:12:03 PM	Tube furnace set to 1000
1/16/2011	3:32:03 PM	Helium valve closed
1/16/2011	3:32:03 PM	BCl3 valve closed
1/16/2011	3:32:03 PM	Main Vac valve closed
1/16/2011	3:32:03 PM	Bypass valve closed
1/16/2011	3:32:03 PM	H2 valve opened
1/16/2011	3:32:03 PM	PH3 valve opened
1/16/2011	3:32:03 PM	SiCl4 pre valve opened
1/16/2011	3:32:03 PM	SiCl4 post valve opened
1/16/2011	3:32:03 PM	Bubbler valve opened
1/16/2011	3:32:03 PM	Helium MFC set to  0.000000
1/16/2011	3:32:03 PM	H2 MFC set to  500.000000
1/16/2011	3:32:03 PM	BCl3 MFC set to  0.000000
1/16/2011	3:32:03 PM	PHl3 MFC set to  0.400000
1/16/2011	3:32:03 PM	SiCl4 MFC set to  50.000000
1/16/2011	3:32:03 PM	Bypass solenoid MFC set to  0.000000
1/16/2011	3:32:03 PM	Tube furnace set to 1000
1/16/2011	3:52:03 PM	H2 valve closed
1/16/2011	3:52:03 PM	BCl3 valve closed
1/16/2011	3:52:03 PM	PH3 valve closed
1/16/2011	3:52:03 PM	SiCl4 pre valve closed
1/16/2011	3:52:03 PM	SiCl4 post valve closed
1/16/2011	3:52:03 PM	Main Vac valve closed
1/16/2011	3:52:03 PM	Bypass valve closed
1/16/2011	3:52:03 PM	Helium valve opened
1/16/2011	3:52:03 PM	Bubbler valve opened
1/16/2011	3:52:03 PM	Helium MFC set to  500.000000
1/16/2011	3:52:03 PM	H2 MFC set to  0.000000
1/16/2011	3:52:03 PM	BCl3 MFC set to  0.000000
1/16/2011	3:52:03 PM	PHl3 MFC set to  0.000000
1/16/2011	3:52:03 PM	SiCl4 MFC set to  0.000000
1/16/2011	3:52:03 PM	Bypass solenoid MFC set to  0.000000
1/16/2011	3:52:03 PM	Tube furnace set to 950
1/16/2011	3:57:03 PM	H2 valve closed
1/16/2011	3:57:03 PM	BCl3 valve closed
1/16/2011	3:57:03 PM	PH3 valve closed
1/16/2011	3:57:03 PM	SiCl4 pre valve closed
1/16/2011	3:57:03 PM	SiCl4 post valve closed
1/16/2011	3:57:03 PM	Main Vac valve closed
1/16/2011	3:57:03 PM	Bypass valve closed
1/16/2011	3:57:03 PM	Helium valve opened
1/16/2011	3:57:03 PM	Bubbler valve opened
1/16/2011	3:57:03 PM	Helium MFC set to  500.000000
1/16/2011	3:57:03 PM	H2 MFC set to  0.000000
1/16/2011	3:57:03 PM	BCl3 MFC set to  0.000000
1/16/2011	3:57:03 PM	PHl3 MFC set to  0.000000
1/16/2011	3:57:03 PM	SiCl4 MFC set to  0.000000
1/16/2011	3:57:03 PM	Bypass solenoid MFC set to  0.000000
1/16/2011	3:57:03 PM	Tube furnace set to 900
1/16/2011	4:02:03 PM	H2 valve closed
1/16/2011	4:02:03 PM	BCl3 valve closed
1/16/2011	4:02:03 PM	PH3 valve closed
1/16/2011	4:02:03 PM	SiCl4 pre valve closed
1/16/2011	4:02:03 PM	SiCl4 post valve closed
1/16/2011	4:02:03 PM	Main Vac valve closed
1/16/2011	4:02:03 PM	Bypass valve closed
1/16/2011	4:02:03 PM	Helium valve opened
1/16/2011	4:02:03 PM	Bubbler valve opened
1/16/2011	4:02:03 PM	Helium MFC set to  500.000000
1/16/2011	4:02:03 PM	H2 MFC set to  0.000000
1/16/2011	4:02:03 PM	BCl3 MFC set to  0.000000
1/16/2011	4:02:03 PM	PHl3 MFC set to  0.000000
1/16/2011	4:02:03 PM	SiCl4 MFC set to  0.000000
1/16/2011	4:02:03 PM	Bypass solenoid MFC set to  0.000000
1/16/2011	4:02:04 PM	Tube furnace set to 850
1/16/2011	4:07:04 PM	H2 valve closed
1/16/2011	4:07:04 PM	BCl3 valve closed
1/16/2011	4:07:04 PM	PH3 valve closed
1/16/2011	4:07:04 PM	SiCl4 pre valve closed
1/16/2011	4:07:04 PM	SiCl4 post valve closed
1/16/2011	4:07:04 PM	Main Vac valve closed
1/16/2011	4:07:04 PM	Bypass valve closed
1/16/2011	4:07:04 PM	Helium valve opened
1/16/2011	4:07:04 PM	Bubbler valve opened
1/16/2011	4:07:04 PM	Helium MFC set to  500.000000
1/16/2011	4:07:04 PM	H2 MFC set to  0.000000
1/16/2011	4:07:04 PM	BCl3 MFC set to  0.000000
1/16/2011	4:07:04 PM	PHl3 MFC set to  0.000000
1/16/2011	4:07:04 PM	SiCl4 MFC set to  0.000000
1/16/2011	4:07:04 PM	Bypass solenoid MFC set to  0.000000
1/16/2011	4:07:04 PM	Tube furnace set to 800
1/16/2011	4:12:04 PM	H2 valve closed
1/16/2011	4:12:04 PM	BCl3 valve closed
1/16/2011	4:12:04 PM	PH3 valve closed
1/16/2011	4:12:04 PM	SiCl4 pre valve closed
1/16/2011	4:12:04 PM	SiCl4 post valve closed
1/16/2011	4:12:04 PM	Main Vac valve closed
1/16/2011	4:12:04 PM	Bypass valve closed
1/16/2011	4:12:04 PM	Helium valve opened
1/16/2011	4:12:04 PM	Bubbler valve opened
1/16/2011	4:12:04 PM	Helium MFC set to  500.000000
1/16/2011	4:12:04 PM	H2 MFC set to  0.000000
1/16/2011	4:12:04 PM	BCl3 MFC set to  0.000000
1/16/2011	4:12:04 PM	PHl3 MFC set to  0.000000
1/16/2011	4:12:04 PM	SiCl4 MFC set to  0.000000
1/16/2011	4:12:04 PM	Bypass solenoid MFC set to  0.000000
1/16/2011	4:12:04 PM	Tube furnace set to 750
1/16/2011	4:17:04 PM	H2 valve closed
1/16/2011	4:17:04 PM	BCl3 valve closed
1/16/2011	4:17:04 PM	PH3 valve closed
1/16/2011	4:17:04 PM	SiCl4 pre valve closed
1/16/2011	4:17:04 PM	SiCl4 post valve closed
1/16/2011	4:17:04 PM	Main Vac valve closed
1/16/2011	4:17:04 PM	Bypass valve closed
1/16/2011	4:17:04 PM	Helium valve opened
1/16/2011	4:17:04 PM	Bubbler valve opened
1/16/2011	4:17:04 PM	Helium MFC set to  500.000000
1/16/2011	4:17:04 PM	H2 MFC set to  0.000000
1/16/2011	4:17:04 PM	BCl3 MFC set to  0.000000
1/16/2011	4:17:04 PM	PHl3 MFC set to  0.000000
1/16/2011	4:17:04 PM	SiCl4 MFC set to  0.000000
1/16/2011	4:17:04 PM	Bypass solenoid MFC set to  0.000000
1/16/2011	4:17:04 PM	Tube furnace set to 700
1/16/2011	4:22:04 PM	H2 valve closed
1/16/2011	4:22:04 PM	BCl3 valve closed
1/16/2011	4:22:04 PM	PH3 valve closed
1/16/2011	4:22:04 PM	SiCl4 pre valve closed
1/16/2011	4:22:04 PM	SiCl4 post valve closed
1/16/2011	4:22:04 PM	Main Vac valve closed
1/16/2011	4:22:04 PM	Bypass valve closed
1/16/2011	4:22:04 PM	Helium valve opened
1/16/2011	4:22:04 PM	Bubbler valve opened
1/16/2011	4:22:04 PM	Helium MFC set to  500.000000
1/16/2011	4:22:04 PM	H2 MFC set to  0.000000
1/16/2011	4:22:04 PM	BCl3 MFC set to  0.000000
1/16/2011	4:22:04 PM	PHl3 MFC set to  0.000000
1/16/2011	4:22:04 PM	SiCl4 MFC set to  0.000000
1/16/2011	4:22:04 PM	Bypass solenoid MFC set to  0.000000
1/16/2011	4:22:04 PM	Tube furnace set to 0
1/16/2011	4:32:05 PM	Helium valve closed
1/16/2011	4:32:05 PM	H2 valve closed
1/16/2011	4:32:05 PM	BCl3 valve closed
1/16/2011	4:32:05 PM	PH3 valve closed
1/16/2011	4:32:05 PM	SiCl4 pre valve closed
1/16/2011	4:32:05 PM	SiCl4 post valve closed
1/16/2011	4:32:05 PM	Main Vac valve closed
1/16/2011	4:32:05 PM	Bypass valve closed
1/16/2011	4:32:05 PM	Bubbler valve closed
1/16/2011	4:32:05 PM	Helium MFC set to  0.000000
1/16/2011	4:32:05 PM	H2 MFC set to  0.000000
1/16/2011	4:32:05 PM	BCl3 MFC set to  0.000000
1/16/2011	4:32:05 PM	PHl3 MFC set to  0.000000
1/16/2011	4:32:05 PM	SiCl4 MFC set to  0.000000
1/16/2011	4:32:05 PM	Bypass solenoid MFC set to  0.000000
1/16/2011	4:32:05 PM	Tube furnace set to 0
1/16/2011	4:32:05 PM	Run finished at 4:32 PM
1/16/2011	4:36:31 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/16/2011	4:36:31 PM	Recipe started at 4:36 PM
1/16/2011	4:36:31 PM	Helium valve closed
1/16/2011	4:36:31 PM	H2 valve closed
1/16/2011	4:36:31 PM	BCl3 valve closed
1/16/2011	4:36:31 PM	PH3 valve closed
1/16/2011	4:36:31 PM	SiCl4 pre valve closed
1/16/2011	4:36:31 PM	SiCl4 post valve closed
1/16/2011	4:36:31 PM	Main Vac valve closed
1/16/2011	4:36:31 PM	Bubbler valve closed
1/16/2011	4:36:31 PM	Bypass valve opened
1/16/2011	4:36:31 PM	Helium MFC set to  0.000000
1/16/2011	4:36:31 PM	H2 MFC set to  0.000000
1/16/2011	4:36:31 PM	BCl3 MFC set to  0.000000
1/16/2011	4:36:31 PM	PHl3 MFC set to  0.000000
1/16/2011	4:36:31 PM	SiCl4 MFC set to  0.000000
1/16/2011	4:36:31 PM	Bypass solenoid MFC set to  0.000000
1/16/2011	4:36:31 PM	Tube furnace set to 0
1/16/2011	4:37:04 PM	Helium valve closed
1/16/2011	4:37:04 PM	H2 valve closed
1/16/2011	4:37:04 PM	BCl3 valve closed
1/16/2011	4:37:04 PM	PH3 valve closed
1/16/2011	4:37:04 PM	SiCl4 pre valve closed
1/16/2011	4:37:04 PM	SiCl4 post valve closed
1/16/2011	4:37:04 PM	Bubbler valve closed
1/16/2011	4:37:04 PM	Main Vac valve opened
1/16/2011	4:37:04 PM	Bypass valve opened
1/16/2011	4:37:04 PM	Helium MFC set to  0.000000
1/16/2011	4:37:04 PM	H2 MFC set to  0.000000
1/16/2011	4:37:04 PM	BCl3 MFC set to  0.000000
1/16/2011	4:37:04 PM	PHl3 MFC set to  0.000000
1/16/2011	4:37:04 PM	SiCl4 MFC set to  0.000000
1/16/2011	4:37:04 PM	Bypass solenoid MFC set to  0.000000
1/16/2011	4:37:04 PM	Tube furnace set to 0
1/16/2011	4:37:04 PM	Run finished at 4:37 PM
1/16/2011	4:37:04 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/16/2011	4:37:10 PM	Helium MFC set to  20.000000
1/16/2011	4:37:17 PM	Helium valve opened
1/16/2011	5:07:15 PM	Helium valve closed
1/16/2011	5:08:15 PM	Helium valve opened
1/16/2011	5:34:52 PM	Helium valve closed
1/16/2011	5:36:02 PM	Recipe started at 5:36 PM
1/16/2011	5:36:02 PM	Helium valve closed
1/16/2011	5:36:02 PM	BCl3 valve closed
1/16/2011	5:36:02 PM	PH3 valve closed
1/16/2011	5:36:02 PM	SiCl4 pre valve closed
1/16/2011	5:36:02 PM	SiCl4 post valve closed
1/16/2011	5:36:02 PM	Main Vac valve closed
1/16/2011	5:36:02 PM	Bypass valve closed
1/16/2011	5:36:02 PM	Bubbler valve closed
1/16/2011	5:36:02 PM	H2 valve opened
1/16/2011	5:36:02 PM	Helium MFC set to  0.000000
1/16/2011	5:36:02 PM	H2 MFC set to  500.000000
1/16/2011	5:36:02 PM	BCl3 MFC set to  0.000000
1/16/2011	5:36:02 PM	PHl3 MFC set to  0.000000
1/16/2011	5:36:02 PM	SiCl4 MFC set to  0.000000
1/16/2011	5:36:02 PM	Bypass solenoid MFC set to  0.000000
1/16/2011	5:36:02 PM	Tube furnace set to 0
1/16/2011	5:37:24 PM	Helium valve closed
1/16/2011	5:37:24 PM	BCl3 valve closed
1/16/2011	5:37:24 PM	PH3 valve closed
1/16/2011	5:37:24 PM	SiCl4 pre valve closed
1/16/2011	5:37:24 PM	SiCl4 post valve closed
1/16/2011	5:37:24 PM	Main Vac valve closed
1/16/2011	5:37:24 PM	Bypass valve closed
1/16/2011	5:37:24 PM	H2 valve opened
1/16/2011	5:37:24 PM	Bubbler valve opened
1/16/2011	5:37:24 PM	Helium MFC set to  0.000000
1/16/2011	5:37:24 PM	H2 MFC set to  500.000000
1/16/2011	5:37:24 PM	BCl3 MFC set to  0.000000
1/16/2011	5:37:24 PM	PHl3 MFC set to  0.000000
1/16/2011	5:37:24 PM	SiCl4 MFC set to  0.000000
1/16/2011	5:37:24 PM	Bypass solenoid MFC set to  0.000000
1/16/2011	5:37:24 PM	Tube furnace set to 1000
1/16/2011	5:57:24 PM	Helium valve closed
1/16/2011	5:57:24 PM	BCl3 valve closed
1/16/2011	5:57:24 PM	Main Vac valve closed
1/16/2011	5:57:24 PM	Bypass valve closed
1/16/2011	5:57:24 PM	H2 valve opened
1/16/2011	5:57:24 PM	PH3 valve opened
1/16/2011	5:57:24 PM	SiCl4 pre valve opened
1/16/2011	5:57:24 PM	SiCl4 post valve opened
1/16/2011	5:57:24 PM	Bubbler valve opened
1/16/2011	5:57:24 PM	Helium MFC set to  0.000000
1/16/2011	5:57:24 PM	H2 MFC set to  500.000000
1/16/2011	5:57:24 PM	BCl3 MFC set to  0.000000
1/16/2011	5:57:24 PM	PHl3 MFC set to  0.200000
1/16/2011	5:57:24 PM	SiCl4 MFC set to  50.000000
1/16/2011	5:57:24 PM	Bypass solenoid MFC set to  0.000000
1/16/2011	5:57:24 PM	Tube furnace set to 1000
1/16/2011	6:17:24 PM	H2 valve closed
1/16/2011	6:17:24 PM	BCl3 valve closed
1/16/2011	6:17:24 PM	PH3 valve closed
1/16/2011	6:17:24 PM	SiCl4 pre valve closed
1/16/2011	6:17:24 PM	SiCl4 post valve closed
1/16/2011	6:17:24 PM	Main Vac valve closed
1/16/2011	6:17:24 PM	Bypass valve closed
1/16/2011	6:17:24 PM	Helium valve opened
1/16/2011	6:17:24 PM	Bubbler valve opened
1/16/2011	6:17:24 PM	Helium MFC set to  500.000000
1/16/2011	6:17:24 PM	H2 MFC set to  0.000000
1/16/2011	6:17:24 PM	BCl3 MFC set to  0.000000
1/16/2011	6:17:24 PM	PHl3 MFC set to  0.000000
1/16/2011	6:17:24 PM	SiCl4 MFC set to  0.000000
1/16/2011	6:17:24 PM	Bypass solenoid MFC set to  0.000000
1/16/2011	6:17:25 PM	Tube furnace set to 950
1/16/2011	6:22:25 PM	H2 valve closed
1/16/2011	6:22:25 PM	BCl3 valve closed
1/16/2011	6:22:25 PM	PH3 valve closed
1/16/2011	6:22:25 PM	SiCl4 pre valve closed
1/16/2011	6:22:25 PM	SiCl4 post valve closed
1/16/2011	6:22:25 PM	Main Vac valve closed
1/16/2011	6:22:25 PM	Bypass valve closed
1/16/2011	6:22:25 PM	Helium valve opened
1/16/2011	6:22:25 PM	Bubbler valve opened
1/16/2011	6:22:25 PM	Helium MFC set to  500.000000
1/16/2011	6:22:25 PM	H2 MFC set to  0.000000
1/16/2011	6:22:25 PM	BCl3 MFC set to  0.000000
1/16/2011	6:22:25 PM	PHl3 MFC set to  0.000000
1/16/2011	6:22:25 PM	SiCl4 MFC set to  0.000000
1/16/2011	6:22:25 PM	Bypass solenoid MFC set to  0.000000
1/16/2011	6:22:25 PM	Tube furnace set to 900
1/16/2011	6:27:25 PM	H2 valve closed
1/16/2011	6:27:25 PM	BCl3 valve closed
1/16/2011	6:27:25 PM	PH3 valve closed
1/16/2011	6:27:25 PM	SiCl4 pre valve closed
1/16/2011	6:27:25 PM	SiCl4 post valve closed
1/16/2011	6:27:25 PM	Main Vac valve closed
1/16/2011	6:27:25 PM	Bypass valve closed
1/16/2011	6:27:25 PM	Helium valve opened
1/16/2011	6:27:25 PM	Bubbler valve opened
1/16/2011	6:27:25 PM	Helium MFC set to  500.000000
1/16/2011	6:27:25 PM	H2 MFC set to  0.000000
1/16/2011	6:27:25 PM	BCl3 MFC set to  0.000000
1/16/2011	6:27:25 PM	PHl3 MFC set to  0.000000
1/16/2011	6:27:25 PM	SiCl4 MFC set to  0.000000
1/16/2011	6:27:25 PM	Bypass solenoid MFC set to  0.000000
1/16/2011	6:27:25 PM	Tube furnace set to 850
1/16/2011	6:32:25 PM	H2 valve closed
1/16/2011	6:32:25 PM	BCl3 valve closed
1/16/2011	6:32:25 PM	PH3 valve closed
1/16/2011	6:32:25 PM	SiCl4 pre valve closed
1/16/2011	6:32:25 PM	SiCl4 post valve closed
1/16/2011	6:32:25 PM	Main Vac valve closed
1/16/2011	6:32:25 PM	Bypass valve closed
1/16/2011	6:32:25 PM	Helium valve opened
1/16/2011	6:32:25 PM	Bubbler valve opened
1/16/2011	6:32:25 PM	Helium MFC set to  500.000000
1/16/2011	6:32:25 PM	H2 MFC set to  0.000000
1/16/2011	6:32:25 PM	BCl3 MFC set to  0.000000
1/16/2011	6:32:25 PM	PHl3 MFC set to  0.000000
1/16/2011	6:32:25 PM	SiCl4 MFC set to  0.000000
1/16/2011	6:32:25 PM	Bypass solenoid MFC set to  0.000000
1/16/2011	6:32:25 PM	Tube furnace set to 800
1/16/2011	6:37:25 PM	H2 valve closed
1/16/2011	6:37:25 PM	BCl3 valve closed
1/16/2011	6:37:25 PM	PH3 valve closed
1/16/2011	6:37:25 PM	SiCl4 pre valve closed
1/16/2011	6:37:25 PM	SiCl4 post valve closed
1/16/2011	6:37:25 PM	Main Vac valve closed
1/16/2011	6:37:25 PM	Bypass valve closed
1/16/2011	6:37:25 PM	Helium valve opened
1/16/2011	6:37:25 PM	Bubbler valve opened
1/16/2011	6:37:25 PM	Helium MFC set to  500.000000
1/16/2011	6:37:25 PM	H2 MFC set to  0.000000
1/16/2011	6:37:25 PM	BCl3 MFC set to  0.000000
1/16/2011	6:37:25 PM	PHl3 MFC set to  0.000000
1/16/2011	6:37:25 PM	SiCl4 MFC set to  0.000000
1/16/2011	6:37:25 PM	Bypass solenoid MFC set to  0.000000
1/16/2011	6:37:25 PM	Tube furnace set to 750
1/16/2011	6:42:25 PM	H2 valve closed
1/16/2011	6:42:25 PM	BCl3 valve closed
1/16/2011	6:42:25 PM	PH3 valve closed
1/16/2011	6:42:25 PM	SiCl4 pre valve closed
1/16/2011	6:42:25 PM	SiCl4 post valve closed
1/16/2011	6:42:25 PM	Main Vac valve closed
1/16/2011	6:42:25 PM	Bypass valve closed
1/16/2011	6:42:25 PM	Helium valve opened
1/16/2011	6:42:25 PM	Bubbler valve opened
1/16/2011	6:42:25 PM	Helium MFC set to  500.000000
1/16/2011	6:42:25 PM	H2 MFC set to  0.000000
1/16/2011	6:42:25 PM	BCl3 MFC set to  0.000000
1/16/2011	6:42:25 PM	PHl3 MFC set to  0.000000
1/16/2011	6:42:25 PM	SiCl4 MFC set to  0.000000
1/16/2011	6:42:25 PM	Bypass solenoid MFC set to  0.000000
1/16/2011	6:42:26 PM	Tube furnace set to 700
1/16/2011	6:47:25 PM	H2 valve closed
1/16/2011	6:47:25 PM	BCl3 valve closed
1/16/2011	6:47:25 PM	PH3 valve closed
1/16/2011	6:47:25 PM	SiCl4 pre valve closed
1/16/2011	6:47:25 PM	SiCl4 post valve closed
1/16/2011	6:47:26 PM	Main Vac valve closed
1/16/2011	6:47:26 PM	Bypass valve closed
1/16/2011	6:47:26 PM	Helium valve opened
1/16/2011	6:47:26 PM	Bubbler valve opened
1/16/2011	6:47:26 PM	Helium MFC set to  500.000000
1/16/2011	6:47:26 PM	H2 MFC set to  0.000000
1/16/2011	6:47:26 PM	BCl3 MFC set to  0.000000
1/16/2011	6:47:26 PM	PHl3 MFC set to  0.000000
1/16/2011	6:47:26 PM	SiCl4 MFC set to  0.000000
1/16/2011	6:47:26 PM	Bypass solenoid MFC set to  0.000000
1/16/2011	6:47:26 PM	Tube furnace set to 0
1/16/2011	7:06:37 PM	Run aborted at 7:06 PM
1/16/2011	7:06:37 PM	Helium valve closed
1/16/2011	7:06:37 PM	H2 valve closed
1/16/2011	7:06:37 PM	BCl3 valve closed
1/16/2011	7:06:37 PM	PH3 valve closed
1/16/2011	7:06:37 PM	SiCl4 pre valve closed
1/16/2011	7:06:37 PM	SiCl4 post valve closed
1/16/2011	7:06:37 PM	Bypass valve closed
1/16/2011	7:06:37 PM	Main Vac valve closed
1/16/2011	7:06:37 PM	Bubbler valve closed
1/16/2011	7:06:37 PM	Helium MFC set to  0.000000
1/16/2011	7:06:37 PM	H2 MFC set to  0.000000
1/16/2011	7:06:37 PM	BCl3 MFC set to  0.000000
1/16/2011	7:06:37 PM	PHl3 MFC set to  0.000000
1/16/2011	7:06:37 PM	SiCl4 MFC set to  0.000000
1/16/2011	7:06:37 PM	Tube furnace set to 0
1/16/2011	7:08:53 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/16/2011	7:08:53 PM	Recipe started at 7:08 PM
1/16/2011	7:08:53 PM	Helium valve closed
1/16/2011	7:08:54 PM	H2 valve closed
1/16/2011	7:08:54 PM	BCl3 valve closed
1/16/2011	7:08:54 PM	PH3 valve closed
1/16/2011	7:08:54 PM	SiCl4 pre valve closed
1/16/2011	7:08:54 PM	SiCl4 post valve closed
1/16/2011	7:08:54 PM	Main Vac valve closed
1/16/2011	7:08:54 PM	Bubbler valve closed
1/16/2011	7:08:54 PM	Bypass valve opened
1/16/2011	7:08:54 PM	Helium MFC set to  0.000000
1/16/2011	7:08:54 PM	H2 MFC set to  0.000000
1/16/2011	7:08:54 PM	BCl3 MFC set to  0.000000
1/16/2011	7:08:54 PM	PHl3 MFC set to  0.000000
1/16/2011	7:08:54 PM	SiCl4 MFC set to  0.000000
1/16/2011	7:08:54 PM	Bypass solenoid MFC set to  0.000000
1/16/2011	7:08:54 PM	Tube furnace set to 0
1/16/2011	7:09:26 PM	Helium valve closed
1/16/2011	7:09:26 PM	H2 valve closed
1/16/2011	7:09:26 PM	BCl3 valve closed
1/16/2011	7:09:26 PM	PH3 valve closed
1/16/2011	7:09:26 PM	SiCl4 pre valve closed
1/16/2011	7:09:26 PM	SiCl4 post valve closed
1/16/2011	7:09:26 PM	Bubbler valve closed
1/16/2011	7:09:26 PM	Main Vac valve opened
1/16/2011	7:09:26 PM	Bypass valve opened
1/16/2011	7:09:26 PM	Helium MFC set to  0.000000
1/16/2011	7:09:26 PM	H2 MFC set to  0.000000
1/16/2011	7:09:26 PM	BCl3 MFC set to  0.000000
1/16/2011	7:09:26 PM	PHl3 MFC set to  0.000000
1/16/2011	7:09:26 PM	SiCl4 MFC set to  0.000000
1/16/2011	7:09:26 PM	Bypass solenoid MFC set to  0.000000
1/16/2011	7:09:26 PM	Tube furnace set to 0
1/16/2011	7:09:26 PM	Run finished at 7:09 PM
1/16/2011	7:09:26 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
